BL15 : experimental equipment

X-ray diffraction (for crystals and thin films)


  • In-plane and out-of-plane measurements
  • Reciprocal space mapping
  • Pole figure measurements
  • X-ray reflectivity measurements 


Multi-axis diffractometer

Basic axes (angular resolutions)
q (0.0001°)
d (0.0002°)
χ (0.001°)
φ (0.001°)
α (0.001°)

Detector, etc.

  • Incident X-ray monitor: ionization chamber
  • Detector: NaI scintillation counter
  • Soller slit: resolutions: 0.2° and 0.4°



Schematic view of diffractometer 

Schematic view of diffractometer

  • BL15 is equipped with a multi-axis diffractometer for X-ray diffraction measurements of single crystals or thin films. By combining five angles (q, d, χ, φ, and α), a wide reciprocal space can be accessed.
  • The sample is mounted at the center of the diffractometer. In the case of a small crystal, a glass capillary is used with a goniometer head (1001, Huber). If the sample is a thin film on a substrate, Al spacers are used to adjust the sample height. The sample is fixed with double-sided tape.
  • The X-ray beam is focused to a size of about 0.5 mm × 0.5 mm on the sample by a bent-cylindrical mirror. If a smaller beam size is necessary, the slit is used in front of the diffractometer.
  • Soller slits are installed to reject background X-rays.The angular resolutions of the slits are 0.2° and 0.4°.


Multi-axis diffractometer. Example of a mounted sample (8-inch wafer)
Fig. 1 Multi-axis diffractometer. Fig. 2 Example of a mounted sample (8-inch wafer).

  Small-angle X-ray scattering (SAXS) 

  Debye-Scherrer camera





Kyushu Synchrotron Light Research Center
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