BL15 : experimental equipment
X-ray diffraction (for crystals and thin films)
- In-plane and out-of-plane measurements
- Reciprocal space mapping
- Pole figure measurements
- X-ray reflectivity measurements
Basic axes (angular resolutions)
- Incident X-ray monitor: ionization chamber
- Detector: NaI scintillation counter
- Soller slit: resolutions: 0.2° and 0.4°
- BL15 is equipped with a multi-axis diffractometer for X-ray diffraction measurements of single crystals or thin films. By combining five angles (q, d, χ, φ, and α), a wide reciprocal space can be accessed.
- The sample is mounted at the center of the diffractometer. In the case of a small crystal, a glass capillary is used with a goniometer head (1001, Huber). If the sample is a thin film on a substrate, Al spacers are used to adjust the sample height. The sample is fixed with double-sided tape.
- The X-ray beam is focused to a size of about 0.5 mm × 0.5 mm on the sample by a bent-cylindrical mirror. If a smaller beam size is necessary, the slit is used in front of the diffractometer.
- Soller slits are installed to reject background X-rays.The angular resolutions of the slits are 0.2° and 0.4°.
|Fig. 1 Multi-axis diffractometer.||Fig. 2 Example of a mounted sample (8-inch wafer).|