Ar ion gun and electron neutralizer
800ºC > T > -110ºC (LN2)
Quick insertion system
XPS: X-ray photoelectron spectroscopy
NEXAFS: Near-edge X-ray absorption fine structure
X-ray photoelectron spectroscopy (XPS) and near-edge X-ray absorption fine structure (NEXAFS) spectroscopy measurements can be performed using this endstation. Solid samples (substrate/powder/wire shaped) can be measured by both methods at the same location on the sample. The spot size of the photon beam is ~1.5 mm (H) × ~0.6 mm (V). The samples are attached with a screw, a mask or double-sided vacuum carbon tape to a 1-inch-diameter sample holder (Figs. 1 and 2). The sample size should be 4 × 4 ~ 15 × 15 mm2, 0.2 ~ 1 mm thick. Thicker samples can be set using a special holder with a dent (Fig. 3). Please contact us for more details.
Fig. 1: Flat holder
Fig. 2: Example of sample setting using masks with two holes (left) and three holes (right).
Fig. 3: Special holder with a dent.